ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,974, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "Bake strategies to enhance lithographic performance of met... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,976, issued on April 14, was assigned to Lam Research Corp. (Fremont, Calif.). "All-in-one dry development for metal-containing photoresis... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,977, issued on April 14, was assigned to UNITED MICROELECTRONICS CORP. (Hsinchu, Taiwan). "Optimization method for mask pattern optical tr... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,978, issued on April 14, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany) and ASML NETHERLANDS B.V. (Veldhoven, Netherlands). "Me... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,979, issued on April 14, was assigned to KLA Corp. (Milpitas, Calif.). "Multi-column large field of view imaging platform" was invented by... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,980, issued on April 14, was assigned to NIKON Corp. (Tokyo). "Stage apparatus, exposure apparatus, method of manufacturing flat panel dis... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,981, issued on April 14, was assigned to GUDENG PRECISION INDUSTRIAL Co. LTD. (New Taipei, Taiwan). "Reticle loading system and method usi... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,982, issued on April 14, was assigned to GUDENG PRECISION INDUSTRIAL Co. LTD (New Taipei, Taiwan). "Workpiece container system" was invent... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,983, issued on April 14, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea). "Home pot and apparatus for treating substrate" was inv... Read More
ALEXANDRIA, Va., April 15 -- United States Patent no. 12,601,984, issued on April 14, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands). "Metrology method and apparatus" was invented by ... Read More